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Fabrication of micron scale ferromagnetic nickel features by selective area organometallic chemical vapor deposition

Dulip Ajantha Welipitiya, University of Nebraska - Lincoln

Abstract

Adsorption, desorption and decomposition of metallocenes have been studied. By carefully investigating their properties it has been shown that ferrocene and nickelocene are potential source compounds for the selective area organometallic chemical vapor deposition process (OMCVD). Surface studies were undertaken using thermal desorption spectroscopy, angle-resolved photoemission and photostimulated desorption. The necessary requirements for the deposition of contaminant free metal features are explored and addressed. I have demonstrated that it is possible to deposit large arrays of geometrically well defined identical micron scale magnetic features. This can be achieved by photolysis of metallocenes with ultra-violet (UV) radiation. The magnetic properties of large arrays of identical micron scale ferromagnetic nickel features were studied by alternating gradient force magnetometry, as well as magnetic force microscopy and Kerr microscopy. The magnetic properties clearly depend on the shape and sizes of these micron scale structures.

Subject Area

Materials science

Recommended Citation

Welipitiya, Dulip Ajantha, "Fabrication of micron scale ferromagnetic nickel features by selective area organometallic chemical vapor deposition" (1997). ETD collection for University of Nebraska-Lincoln. AAI9805530.
https://digitalcommons.unl.edu/dissertations/AAI9805530

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