The Use of Two-Dimensional Detectors for Snapshot and High Accuracy Imaging Ellipsometry

Authors

Jeremy A. VanDerslice, University of Nebraska-LincolnFollow

First Advisor

Jeffrey Shield

Degree Name

Doctor of Philosophy (Ph.D.)

Department

Mechanical Engineering and Applied Mechanics

Date of this Version

12-2024

Document Type

Dissertation

Citation

A dissertation presented to the faculty of the Graduate College at the University of nebraska in partial fulfillment of requirements for the degree of Doctor of Philosophy

Major: Mechanical Engineering and Applied Mechanics

Under the supervision of Professor Jeffrey Shield

Lincoln, Nebraska, December 2024

Comments

Copyright 2024, Jeremy A. VanDerslice. Used by permission

Abstract

Ellipsometry is a powerful and sensitive optical technique used to characterize thin film thickness and optical properties by measuring changes in the polarization state of light upon reflection or transmission. This dissertation investigates novel ellipsometry configurations that use two-dimensional detectors to enhance measurement speed, spatial resolution, or accuracy of ellipsometry measurements. The study involves the development of three different ellipsometry configurations, encompassing mechanical prototypes, mathematical models, and test measurements to evaluate each system.

Advisor: Jeffrey Shield

Recommended Citation

VanDerslice, Jeremy A., "The Use of Two-Dimensional Detectors for Snapshot and High Accuracy Imaging Ellipsometry" (2024). Dissertations and Doctoral Documents from University of Nebraska-Lincoln, 2023–. 231.
https://digitalcommons.unl.edu/dissunl/231