Ellipsometric analysis of computer disk structures

Authors

Ping He, University of Nebraska-Lincoln
Bhola N. De, University of Nebraska-Lincoln
Laing-Yao Chen, University of Nebraska-Lincoln
Yong Zhao, University of Nebraska-Lincoln
John A. Woollam, University of Nebraska-LincolnFollow
Mark Miller, Imprimis Technology, Inc., 7801 Computer Avenue South, Minneapolis, Minnesota
Edward Simpson, Imprimis Technology, Inc., 7801 Computer Avenue South, Minneapolis, Minnesota

Document Type

Article

Date of this Version

5-1-1990

Comments

Published in J. Appl. Phys. -- May 1, 1990 -- Volume 67, Issue 9, pp. 4878-4880. Copyrighted by The American Institute of Physics. Used by permission.

Abstract

Abstract: We have used variable angle spectroscopic ellipsometry (VASE) to analyze the materials surfaces and interfaces in multilayer sputtered media computer disks. Specifically, the system C/CoNiCr/Cr/NiP/Al has been investigated for layer thicknesses, interfacial and surface roughness, and radial and circumferential uniformity. By first characterizing the Cr/NiP/Al then CoNiCr/Cr/NiP/Al structures, we were able to fully characterize the complete disk structure. The interface width between the carbon layer and CoNiCr magnetic layer was determined to be approximately 260 Å. This is reasonable considering typical surface roughness present on magnetic disks, and that the carbon “fills” in this surface roughness. VASE is a nondestructive technique and used at atmospheric pressure, and is thus suitable for use in a production environment.