Empirical Correction for Spectroscopic Ellipsometric Measurements of Rough or Textured Surfaces

Authors

Craig M. Herzinger, Lincoln, NE
Blaine D. Johs, Lincoln, NE
Mathias M. Schubert, Lincoln, NEFollow
Tino Hofmann, Lincoln, NEFollow

Document Type

Article

Date of this Version

2012

Citation

Patent No.: US 8.248,607 B1

Comments

Appl. No.: 12/804,958

Abstract

A method of applying spectroscopic ellipsometry to arrive at accurate values of optical and physical properties for thin films on samples having rough or textured surfaces.