Electrical and Computer Engineering, Department of
Department of Electrical and Computer Engineering: Faculty Publications
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Document Type
Article
Date of this Version
2012
Citation
Patent No.: US 8.248,607 B1
Abstract
A method of applying spectroscopic ellipsometry to arrive at accurate values of optical and physical properties for thin films on samples having rough or textured surfaces.
COinS
Comments
Appl. No.: 12/804,958