MULTI-AOI-SYSTEM FOR EASY CHANGING ANGLES OF INCIDENCE IN ELLIPSOMETER, POLARIMETER AND REFLECTOMETER SYSTEMS

Authors

Blaine D. Johs, Lincoln, NE
Ping He, Lincoln, NE
Martin M. Liphardt, Lincoln, NE
Christopher A. Goeden, Lincoln, NE
John A. Woollam, Lincoln, NEFollow
James D. Welch, Omaha, NE

Document Type

Article

Date of this Version

2-22-2005

Citation

United States Patent Patent No.: US 6,859,278 B1

Abstract

Disclosed is a system for enabling easy sequential setting of different Angles-of-Incidence of a beam of electromagnetic radiation to a surface of a sample system, and to regression based methodology for evaluating and compensating the effects of the presence of electromagnetic beam intercepting angle-of-incidence changing systems, including where desired, parameterization of calibration parameters.