Electrical & Computer Engineering, Department of
Date of this Version
2-22-2005
Citation
United States Patent Patent No.: US 6,859,278 B1
Abstract
Disclosed is a system for enabling easy sequential setting of different Angles-of-Incidence of a beam of electromagnetic radiation to a surface of a sample system, and to regression based methodology for evaluating and compensating the effects of the presence of electromagnetic beam intercepting angle-of-incidence changing systems, including where desired, parameterization of calibration parameters.
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