Electrical and Computer Engineering, Department of
Department of Electrical and Computer Engineering: Faculty Publications
Accessibility Remediation
If you are unable to use this item in its current form due to accessibility barriers, you may request remediation through our remediation request form.
Document Type
Article
Date of this Version
3-17-2009
Citation
United States Patent Patent No.: US 7,505,134 B1
Abstract
Systems and methodology for orienting the tip/tilt and vertical height of samples, preferably automated, as applied in ellipsometer and the like systems.
COinS