Electrical & Computer Engineering, Department of
Date of this Version
2015
Citation
United States Patent Weber-Bargionietal et al. Patent No.: US 8,984,661 B2
Abstract
This disclosure provides systems, methods, and apparatus related to probes for multidimenisonal nanospectroscopic imaging. In one aspect, a method includes providing a transparent tip comprising a dielectric material. A four-sided pyramidal-shaped structure is formed at an apex of the transparent tip using a focus ion beam. Metal layers are deposited over two opposing sides of the four-sided pyramidal-shaped structure.
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