ASPECTS OF PRODUCING, DIRECTING, CONDITIONING, IMPINGING AND DETECTING SPECTROSCOPIC ELECTROMAGNETIC RADIATION FROM SMALL SPOTS ON SAMPLES

Authors

• Martin M. Liphardt, Lincoln, Ne
• Ping He, Lincoln, Ne
• Blaine D. Johs, Lincoln, Ne
• Galen L. Pfeiffers, Lincoln, Ne
• James D. Welch, Omaha, Ne
• John A. Woollam, Lincoln, NeFollow

Document Type

Article

Date of this Version

2008

Comments

United States Patent Liphardt et al. Patent No.: US 7,317,529 B1

Abstract

Sytems and mehtods for providing and enhancing electromagnetic radiation beam radail energy homogeneity and intensity vs. wavelength content, for reliably directing electromagnetic radiation emitted by a source thereof in a common direction, for achromatically reducing spot size on a sample (eg. liquid cavity containing lenses and low aberration 1:1 imaging systems modified to perform as spatial filters), and for directing directing different wavelengths into different detectors, in ellipsometer, polarizer or the like systems.