ASPECTS OF PRODUCING, DIRECTING, CONDITIONING, IMPINGING AND DETECTING SPECTROSCOPIC ELECTROMAGNETIC RADIATION FROM SMALL SPOTS ON SAMPLES

Authors

Martin M. Liphardt, Lincoln, Ne
Ping He, Lincoln, Ne
Blaine D. Johs, Lincoln, Ne
Galen L. Pfeiffers, Lincoln, Ne
James D. Welch, Omaha, Ne
John A. Woollam, Lincoln, NeFollow

Date of this Version

2008

Comments

United States Patent Liphardt et al. Patent No.: US 7,317,529 B1

Abstract

Sytems and mehtods for providing and enhancing electromagnetic radiation beam radail energy homogeneity and intensity vs. wavelength content, for reliably directing electromagnetic radiation emitted by a source thereof in a common direction, for achromatically reducing spot size on a sample (eg. liquid cavity containing lenses and low aberration 1:1 imaging systems modified to perform as spatial filters), and for directing directing different wavelengths into different detectors, in ellipsometer, polarizer or the like systems.