Electrical & Computer Engineering, Department of

 

Document Type

Article

Date of this Version

2010

Citation

UnitedStates Patent Pribi et al. Patent No.: US 7,768,660 B1

Abstract

Disclosed is the use of a focused electromagnetic beam which is caused to impinge on the top surface of a tube shaped sample, to investigate a film coating on inner surface during fabrication thereof and/or thereafter.

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