Electrical and Computer Engineering, Department of
Department of Electrical and Computer Engineering: Faculty Publications
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Document Type
Article
Date of this Version
2010
Citation
UnitedStates Patent Pribi et al. Patent No.: US 7,768,660 B1
Abstract
Disclosed is the use of a focused electromagnetic beam which is caused to impinge on the top surface of a tube shaped sample, to investigate a film coating on inner surface during fabrication thereof and/or thereafter.
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