SYSTEM AND METHOD OFSELECTIVELY MONITORING SAMPLE FRONT AND BACKSIDE REFLECTIONS IN ELLIPSOMETER AND THE LIKE SYSTEMS

Authors

James D. Welch, Omaha, Ne
John A. Woollam, J. A. Wollam CompanyFollow
Martin M Liphardt, University of Nebraska - Lincoln

Date of this Version

2008

Citation

United States Patent Welch et al. Patent No.: US 7,385,698 B1

Abstract

A spectrophotometer, reflectometer, ellipsometer polarimeter or the like system having a detector means for independently intercepting electromagnetic radiation reflected from a sample frontside or backside, and methodology for pursuing less correlated determination of refractive index and thickness values.