Electrical & Computer Engineering, Department of
Date of this Version
2008
Citation
United States Patent Welch et al. Patent No.: US 7,385,698 B1
Abstract
A spectrophotometer, reflectometer, ellipsometer polarimeter or the like system having a detector means for independently intercepting electromagnetic radiation reflected from a sample frontside or backside, and methodology for pursuing less correlated determination of refractive index and thickness values.
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