Electrical and Computer Engineering, Department of

 

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Document Type

Article

Date of this Version

6-10-2008

Citation

Patent No.: US 7,385,697 B2

Abstract

Simultaneous use of wavelengths in at least two ranges Selected from RADIO, MICRO. FIR, IR, NIR-VIS-NUV. UV, DUV, VUV EUV, XRAY in a regression procedure to evaluate parameters in mathematical dispersion structures to model dielectric functions.

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