SAMPLE ANALYSIS METHODOLOGY UTILIZNGELECTROMAGNETIC RADATION

Authors

John A. Woollam, Lincoln, NE
Corey L. Bungay, Lincoln, NE
Thomas E. Tiwald, Lincoln, NE
Martin M. Liphardt, Lincoln, NE
Ronald A. Synowicki, Lincoln, NE
Gregory K. Pribil, Lincoln, NE
Craig M. Herzinger, Lincoln, NE
Blaine D. Johs, Lincoln, NE
James N. Hilfiker, Lincoln, NE

Document Type

Article

Date of this Version

6-10-2008

Citation

Patent No.: US 7,385,697 B2

Abstract

Simultaneous use of wavelengths in at least two ranges Selected from RADIO, MICRO. FIR, IR, NIR-VIS-NUV. UV, DUV, VUV EUV, XRAY in a regression procedure to evaluate parameters in mathematical dispersion structures to model dielectric functions.