SYSTEM FOR AND METHOD OF INVESTIGATING THE EXACT SAME POINT ON A SAMPLE SUBSTRATE WITH MULTIPLE WAVELENGTHS

Authors

Galen L. Pfeiffer, Lincoln, NE
Martin M. Liphardt, Lincoln, NE
Blaine D. Johs, Lincoln, NE
Craig M. Herzinger, Lincoln, NE
Christopher A. Goeden, Lincoln, NE
Ping He, Lincoln, NE
John A. Woollam, Lincoln, NE
James D. Welch, Omaha, NE

Date of this Version

5-3-2007

Citation

Pub. No.: US 2007/0097373 A1

Abstract

Disclosed are system for and method of analyzing a sample at Substantially the exact same Small spot point on a sample with a plurality of wavelengths.