Electrical and Computer Engineering, Department of
Department of Electrical and Computer Engineering: Faculty Publications
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Document Type
Article
Date of this Version
12-4-2007
Citation
Patent No.: US 7,304.737 B1
Abstract
The present invention relates to ellipsometer systems, and more particularly to ellipsometer systems comprising trans missive rotating or stepwise rotatable compensators for continuously or step-wise varying polarization states and further comprising transmissive multi-element lens focusing of a spectroscopic electromagnetic beam into a small, chromatically relatively undispersed area spot on a sample system. The ellipsometer system optionally is present in an environmental control chamber.
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