Mechanical & Materials Engineering, Department of

 

Document Type

Article

Date of this Version

2017

Citation

AIP ADVANCES 7, 055113 (2017).

Comments

© 2017 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution (CC BY) license.

Abstract

We studied mode couplings in thin film bulk acoustic wave resonators of a piezoelectric film on a dielectric layer operating with the fundamental thickness-extensional mode. A system of plate equations derived in our previous paper was used which includes the couplings to the unwanted in-plane extension, flexure, fundamental and second-order thickness shear modes. It was shown that the couplings depend strongly on the plate length/thickness ratio. For a relatively clean operating mode with weak couplings to unwanted modes, a series of discrete values of the plate length/thickness ratio should be avoided and these values were determined in the present paper. The results can be of great significance to the design and optimization of film bulk acoustic wave resonators.

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