Mechanical & Materials Engineering, Department of
Date of this Version
2019
Citation
International Journal of Acoustics and Vibration, Vol. 24, No. 1, 2019
Abstract
We propose a new structure for piezoelectric gyroscopes. It is made from multilayered thin films of AlN or ZnO with alternating c-axes along the film thickness. It is shown theoretically that when such a film is electrically driven into higher-order overtone thickness-shear vibration in one of the two in-plane directions of the film and is rotating about the film normal, the Coriolis force due to the rotation causes a higher-order overtone thicknessshear vibration in a perpendicular direction with an electrical output that can be used to measure the angular rate of the rotation. Different from existing thickness-shear mode piezoelectric gyroscopes which are based on the fundamental or the second overtone thickness-shear mode, the proposed gyroscope operates with higher-order overtone thickness-shear modes with higher frequencies and hence potentially higher sensitivity. Because of the overtone modes, the Coriolis force acting on the gyroscope forms a self-equilibrated system and does not transmit a net force or torque to the mounting structure. This implies higher device quality factor and better performance.
Included in
Mechanics of Materials Commons, Nanoscience and Nanotechnology Commons, Other Engineering Science and Materials Commons, Other Mechanical Engineering Commons
Comments
https://doi.org/10.20855/ijav.2019.24.11147