Research Papers in Physics and Astronomy


Date of this Version

July 1989


Published in the Journal of Vacuum Science and Technology A 7 (4), Jul/Aug 1989. Copyright © 1989 American Vacuum Society. Used by permission. For free online abstracts, see


We have investigated photoassisted, plasma enhanced chemical vapor deposition and pyrolytic deposition of boron from decaborane (B10H14) and boron nitride from decaborane combined with nitrogen or ammonia. The use of decaborane for depositing boron and boron nitride thin films is seen as a viable alternative to diborane or boron halides.

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