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Peter Dowben Publications

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Document Type

Article

Date of this Version

May 1991

Comments

Published in Mat. Res. Soc. Symp. Proc. Vol. 190. © l991 Materials Research Society. Permission to use.

Abstract

By combining pentaborane (B5H9) and decarborane (B10H14) with methane in a plasma reactor, a variety of boron-carbides can be made over a wide range of compositions. The resulting thin films have uniform composition and appear to be polycrystalline.

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