Low-Pressure Source of Slow Metastable Rare Gas Atoms

Authors

• M. H.L. van der Velden, Eindhoven University of Technology
• Herman Batelaan, University of Nebraska - LincolnFollow
• E. te Sligte, Eindhoven University of Technology
• H. C.W. Beijerinck, Eindhoven University of Technology
• E. J.D. Vredenbregt, Eindhoven University of TechnologyFollow

Document Type

Article

Date of this Version

4-2004

Citation

Review of Scientific Instruments (April 2004) 75(4): 1,073-1,077. DOI: 10.1063/1.1666988.

Comments

Copyright 2004, American Institute of Physics. Used by permission.

Abstract

We investigate the properties of a commercial inverted magnetron pressure gauge for use as a source of slow metastable rare gas atoms. We find that the velocity distribution of the atoms as well as the pressure dependence of the output flux agree with a simple model. This shows that the low-velocity output of the source is enhanced over the Maxwell–Boltzmann form due to a velocity-dependent excitation probability. For argon, the center-line intensity per unit area of the source is measured to be greater than 4.2x10¹⁵ Ar 1s₅ atoms/(s srm²) at a pressure of 23 mPa. When observing the entire source area, the center-line intensity is at least 2.6x10¹¹ Ar 1s₅ atoms/(s sr).