Superconducting Y-Ba-Cu-O oxide films by sputtering

Authors

M. Hong, AT&T Bell Laboratories, Murray Hill, New Jersey
Sy_Hwang Liou, University of Nebraska-LincolnFollow
J. Kwo, AT&T Bell Laboratories, Murray Hill, New Jersey
B.A. Davidson, AT&T Bell Laboratories, Murray Hill, New Jersey

Date of this Version

August 1987

Comments

Published by American Institute of Physics. Appl. Phys. Lett. 51, 694 (1987). ©1987 American Institute of Physics. Permission to use. Journal home page = http://jap.aip.org/jap/.

Abstract

We have prepared superconducting thin films of Y-Ba-Cu-O with T_c onsets above 95 K by both diode and magnetron sputtering. Films with full superconductivity (R=0) at 85 K have been produced by dc magnetron sputtering. The compositions of the films are fairly uniform across an area 50 mm in diameter and through the film thickness. Structural properties of the films were studied by x-ray diffraction. Critical current densities in the range of 3000 to 10⁴ A/cm² have been measured at 4.2 K. Applied Physics Letters is copyrighted by The American Institute of Physics.