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We have studied the effect of Au on the ordering temperature of CoPt films. The coercivity of the CoPt multilayer with 2 nm Au inserted is around 5 kOe after annealing at 400 °C. This ordering temperature is about 200 °C lower than that of a pure CoPt film. Crystallographical analysis using x-ray diffraction has also revealed that the lattice constant is drastically changed around the same temperature, which is related to the formation of the L10-ordered structure. Thus, the Au plays an important role in reducing the ordering temperature.