Electrical Engineering, Department of
Date of this Version
January 2007
Abstract
A spectroscopic ellipsometer or polarimeter system having a source of a polychromatic beam of electromagnetic radiation, a polarizer, a stage for supporting a material system, an analyzer, a dispersive optics and a detector system which comprises a multiplicity of detector elements, there being apertures before the stage for supporting a material system, and thereafter, the system being present in an environmental control chamber.
Comments
United States Patent Number: US 7,158,231 B1. Date of Patent: Jan. 2,2007