Electrical & Computer Engineering, Department of

 

Document Type

Article

Date of this Version

5-8-2007

Comments

United States Patent Number: US 7,215,423 B1. Date of Patent: May 8, 2007.

Abstract

System and methodology for controlling a beam spot size where it impinges onto a sample, and/or discriminant selection and analysis of data from detector elements in a two dimensional detector array which correspond to identified regions on a sample.

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