Electrical & Computer Engineering, Department of
Date of this Version
5-8-2007
Abstract
System and methodology for controlling a beam spot size where it impinges onto a sample, and/or discriminant selection and analysis of data from detector elements in a two dimensional detector array which correspond to identified regions on a sample.
Comments
United States Patent Number: US 7,215,423 B1. Date of Patent: May 8, 2007.