Electrical Engineering, Department of
Title
Control of Beam Spot Size in Ellipsometer and The Like Systems
Document Type
Article
Date of this Version
May 2007
Abstract
System and methodology for controlling a beam spot size where it impinges onto a sample, and/or discriminant selection and analysis of data from detector elements in a two dimensional detector array which correspond to identified regions on a sample.
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Comments
United States Patent Number: US 7,215,423 B1. Date of Patent: May 8, 2007.