Electrical Engineering, Department of
Title
Ellipsometer or Polarimeter and The Like System with Multiple Detector Element Detector in Environmental Control Chamber Including Secure Sample Access
Document Type
Article
Date of this Version
August 2007
Abstract
A spectrophotometer, ellipsometer or polarimeter or the like system with a spectroscopic source of wavelengths and a detector with multiple detector elements for simultaneous monitoring of a number of wavelengths in an environmental control chamber which optionally provides for secured sample entry, and methodology of use.
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Comments
United States Patent NO.: US 7,253,900 B1. Date of Patent: Aug. 7,2007.