Electrical and Computer Engineering, Department of
Department of Electrical and Computer Engineering: Faculty Publications
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Document Type
Article
Date of this Version
5-6-1983
Abstract
Amorphous, “diamond-like” Carbon films have been deposited on Si substrates, using ion-beam sputtering. The interfacial properties are studied using capacitance and conductance measurements. Data are analyzed using existing theories for interfacial electrical properties. The density of electronic states at the interface, along with corresponding time constants are determined, and the density of interface states is unusually low for an as yet unoptimized
Comments
Published in IEEE Electron Device Letters, Vol. EDL-4, No. 5 May 1983 Copyright 1983 IEEE. Used by permission.