Study of Mo, Au, and Ni Implanted Molybdenum Laser Mirrors By Spectroscopic Ellipsometry

Authors

Paul G. Snyder, University of Nebraska-Lincoln
George H. Bu-Abbud, University of Nebraska-Lincoln
Jae Oh, University of Nebraska-Lincoln
John A. Woollam, University of Nebraska-LincolnFollow
David Poker, Oak Ridge National Laboratory
D. E. Aspnes, Bell Communications Research, Inc.
David Ingram, Universal Energy System
Peter Pronko, Universal Energy System

Document Type

Article

Date of this Version

1985

Citation

In: Laser Induced Damage in Optical Materials: Boulder Damage Symposium 1985; ASTM STP 1015

Comments

Copyright 1988 by ASTM International. Used by permission.

Abstract

The implantation of 150 kev molybdenum ions into polished molybdenum laser mirrors is found to increase the complex dielectric constant in the visible spectrum. Analysis using the Bruggeman effective medium approximation demonstrates that the increase is due to surface smoothing and that the surface is made nearly atomically smooth by a fluence of 5 x 10¹⁵ /cm². Implantation of Au at 1Mev caused considerable microscopic roughening, as well as a change in the bulk optical properties. 3 MeV Ni ion implantation caused only a slight surface roughening. A thin dielectric film (probably a hydrocarbon) is found to condense in a laboratory atmosphere, reducing the reflectivity, and is removable by rinsing with methanol and distilled water.