Electrical & Computer Engineering, Department of
Document Type
Article
Date of this Version
2011
Citation
APPLIED PHYSICS LETTERS 98, 123109 (2011); doi:10.1063/1.3569720
Abstract
Rapid single-step fabrication of graphene patterns was developed using laser-induced chemical vapor deposition (LCVD). A laser beam irradiates a thin nickel foil in a CH4 and H2 environment to induce a local temperature rise, thereby allowing the direct writing of graphene patterns in precisely controlled positions at room temperature. Line patterns can be achieved with a single scan without pre- or post-processes. Surprisingly, the growth rate is several thousand times faster than that of general CVD methods. The discovery and development of the LCVD growth process provide a route for the rapid fabrication of graphene patterns for various applications.
Comments
Copyright 2011 American Institute of Physics