Ellipsometer or Polarimeter and The Like System with Multiple Detector Element Detector in Environmental Control Chamber Including Secure Sample Access

Authors

John A. Woollam, University of Nebraska-LincolnFollow
Gregory K. Pribil, Lincoln, NE
Martin M. Liphardt, Lincoln, NE
James Welch, Omaha, Nebraska

Date of this Version

8-7-2007

Comments

United States Patent NO.: US 7,253,900 B1. Date of Patent: Aug. 7,2007.

Abstract

A spectrophotometer, ellipsometer or polarimeter or the like system with a spectroscopic source of wavelengths and a detector with multiple detector elements for simultaneous monitoring of a number of wavelengths in an environmental control chamber which optionally provides for secured sample entry, and methodology of use.