Electrical & Computer Engineering, Department of
Ellipsometer or Polarimeter and The Like System with Multiple Detector Element Detector in Environmental Control Chamber Including Secure Sample Access
Date of this Version
A spectrophotometer, ellipsometer or polarimeter or the like system with a spectroscopic source of wavelengths and a detector with multiple detector elements for simultaneous monitoring of a number of wavelengths in an environmental control chamber which optionally provides for secured sample entry, and methodology of use.
United States Patent NO.: US 7,253,900 B1. Date of Patent: Aug. 7,2007.