SAMPLE ENTRY PURGE SYSTEM IN SPECTROPHOTOMETER, ELLIPSOMETER, POLARIMETER AND THE LIKE SYSTEMS

Authors

Steven E. Green, Lincoln, NE
Ping He, Lincoln, NE
Galen L. Pfeiffer, Lincoln, NE
Brian D. Guenther, Lincoln, NE
Gerald T. Cooney, Lincoln, NE
John A. Woollam, Lincoln, NEFollow
Martin M. Liphardt, Lincoln, NE
Blaine D. Johs, Lincoln,NE
Craig M. Herzinger, Lincoln, NE

Date of this Version

9-25-2007

Citation

United States Patent Green et al. Patent N0.: US 7,274,450 B1

Abstract

A sample sequestering system which allows access to a subspace in a chamber encompassed generally enclosed space, for use in entering and removing a sample when the subspace is opened to atmosphere. Sufficient purge gas is flowed from withing the generally enclosed space into the subspace discourage atmospheric contaminates from entering into the space is a spectrophotometer, ellipsometer or polarimeter or the like system which operates at wavelengths, (eg. UV), which are advesely affected, (eg. absorded), by typical atmospheric contents.