Electrical & Computer Engineering, Department of
Date of this Version
10-2-2007
Citation
Patent N0.: US 7,277,171 B1
Abstract
A substantially self-contained “on-boar ” material system investigation system functionally mounted on a three dimen sional locational system to enable positioning at desired locations on, and distances from, the surface of a large sample, including the capability to easily and conveniently change the angle-of-incidence of a beam of electromagnetic radiation onto a sample surface.
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