Electrical & Computer Engineering, Department of

 

Document Type

Article

Date of this Version

1-6-1998

Citation

United States Patent Patent N.: 5,706,087

Abstract

Disclosed is an electromagnetic beam directing means for use with sample analysis systems, such as reflectometers, ellipsometers and polarimeters and the like, use of which facilitates investigation of sample systems which are not mounted to a sample analysis system sample system supporting stage. The present invention eliminates the requirement of extensive sample analysis system component realignment when alternatingly performing analysis of sample systems mounted upon, and mounted other than upon, a sample analysis system sample system supporting stage.

Share

COinS