Electrical & Computer Engineering, Department of
Document Type
Article
Date of this Version
1998
Citation
Patent Number: 5,706,212
Abstract
A sample system investigation system, such as an ellipsometer or polarimeter system, for use in investigating sample systems with electromagnetic wavelengths in the infrared range, and a calibration method for compensating nonidealities in multi-dimensional system rotated and non-rotated component representing matricies, are disclosed. An essentially achromatic compensator of dual-rhomb construction, which introduces a (3*LAMBDA/4) phase shift, but essentially no deviation in the direction of propagation of a polarized beam of electromagnetic wavelengths caused to pass there through, even when said compensator is caused to continuously rotate, is also disclosed.
COinS
Comments
Appl. No.: 618,820