Electrical & Computer Engineering, Department of
Date of this Version
6-10-2008
Citation
United States Patent Patent No.: US 7,385,697 B2
Abstract
Simultaneous use of wavelengths in at least two ranges selected from RADIO, MICRO, FIR, IR, NIR-VIS-NUV, UV, DUV, VUV, EUV, XRAY in a regression procedure to evaluate parameters in mathematical dispersion structures to model dielectric functions.
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