COMBINED USE OF OSCILLATING MEANS AND ELLIPSOMETRY TO DETERMINE UNCORRELATED EFFECTIVE THICKNESS AND OPTICAL CONSTANTS OF MATERIAL DEPOSITED AT OR ETCHED FROM A WORKING ELECTRODE THAT PREFERRABLY COMPRISES NON - NORMAL ORIENTED NANOFIBERS

Authors

Mathias M. Schubert, Lincoln , NE
Tino Hofmann, Harrisburg , NC
John A. Woollam, Lincoln , NE
Rebecca Y. Lai, Lincoln , NE

Document Type

Article

Date of this Version

8-14-2018

Citation

Patent No . : US 10 , 048 , 059 B1

Abstract

Disclosed are systems and methods that enable determination of uncorrelated thickness of a working electrode and surface region optical constants in settings involving electrochemical processing at a working electrodes in a Piezo electric Balance system , by simultaneous application of an Ellipsometer system , the working electrode optionally having a multiplicity of nanofibers that are oriented non normally to a surface of said working electrode . Further disclosed is , simultaneous with said determinations , the monitoring of electrochemical processes at a piezoelectric balance working electrode driven by electrical energy applied between said working electrode and counter electrode .