Electrical & Computer Engineering, Department of

 

Document Type

Article

Date of this Version

3-20-2007

Comments

United States Patent Number: US 7,193,710 B1. Date of Patent: Mar. 20, 2007.

Abstract

Disclosed are spectroscopic ellipsometer systems which include polarizer and analyzer elements which remain fixed in position during data acquisition, and at least one continuously rotating or step-wise rotatable compensator which transmits an electromagnetic beam therethrough and imposes a continuously variable or plurality of sequentially discrete polarization states on a beam of electromagnetic radiation; and at least one multiple element lens which also transmits the electromagnetic beam therethrough.

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