Rotating or Rotatable Compensator Spectroscopic Ellipsometer System Including Multiple Element Lenses

Authors

Blaine D. Johs, Lincoln, NE (US)
Martin M. Liphardt, Lincoln, NE
Jeffrey S. Hale, Lincoln, NE
Craig M. Herzinger, Lincoln, NE (US)
Steven E. Green, Lincoln, NE (US)
Ping He, Lincoln, NE (US)
John A. Woollam, University of Nebraska-LincolnFollow

Document Type

Article

Date of this Version

3-20-2007

Comments

United States Patent Number: US 7,193,710 B1. Date of Patent: Mar. 20, 2007.

Abstract

Disclosed are spectroscopic ellipsometer systems which include polarizer and analyzer elements which remain fixed in position during data acquisition, and at least one continuously rotating or step-wise rotatable compensator which transmits an electromagnetic beam therethrough and imposes a continuously variable or plurality of sequentially discrete polarization states on a beam of electromagnetic radiation; and at least one multiple element lens which also transmits the electromagnetic beam therethrough.