Method of Calibrating Effects of Field of Classification Search Multi-AOI-System for Easy Changing Angles-of-Incidence In Ellipsometers and The Like

Authors

• Blaine D. Johs, Lincoln, NE (US)
• Ping He, Lincoln, NE
• Martin M. Liphardt, Lincoln, NE
• Christopher A. Goeden, Lincoln, NE (US)
• John A. Woollam, University of Nebraska-LincolnFollow
• James D. Welch, Omaha, Nebraska

Document Type

Article

Date of this Version

9-4-2007

Comments

United States Patent NO.: US 7,265,838 B1. Date of Patent: *Sep. 4, 2007.

Abstract

Disclosed is a system for enabling easy sequential setting of different Angles-of-Incidence of a beam of electromagnetic radiation to a surface of a sample system involving regression based methodology for evaluating and compensating the effects of the presence electromagnetic beam intercepting angle-of-incidence changing systems, including where desired, parameterization of calibration parameters.