Method of Calibrating Effects of Field of Classification Search Multi-AOI-System for Easy Changing Angles-of-Incidence In Ellipsometers and The Like

Authors

Blaine D. Johs, Lincoln, NE (US)
Ping He, Lincoln, NE
Martin M. Liphardt, Lincoln, NE
Christopher A. Goeden, Lincoln, NE (US)
John A. Woollam, University of Nebraska-LincolnFollow
James D. Welch, Omaha, Nebraska

Document Type

Article

Date of this Version

9-4-2007

Comments

United States Patent NO.: US 7,265,838 B1. Date of Patent: *Sep. 4, 2007.

Abstract

Disclosed is a system for enabling easy sequential setting of different Angles-of-Incidence of a beam of electromagnetic radiation to a surface of a sample system involving regression based methodology for evaluating and compensating the effects of the presence electromagnetic beam intercepting angle-of-incidence changing systems, including where desired, parameterization of calibration parameters.