Electrical & Computer Engineering, Department of

 

Document Type

Article

Date of this Version

9-4-2007

Comments

United States Patent NO.: US 7,265,838 B1. Date of Patent: *Sep. 4, 2007.

Abstract

Disclosed is a system for enabling easy sequential setting of different Angles-of-Incidence of a beam of electromagnetic radiation to a surface of a sample system involving regression based methodology for evaluating and compensating the effects of the presence electromagnetic beam intercepting angle-of-incidence changing systems, including where desired, parameterization of calibration parameters.

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