Electrical & Computer Engineering, Department of
Document Type
Article
Date of this Version
1998
Citation
United States Patent Thompson et al. Patent Number: 5,706,087
Abstract
Disclosed is an electromagnetic beam directing means for use with sample analysis systems, such as relfectometers, ellipsometers and polarimeters and the like, use of which facilitates investigation of sample systems which are not mounted to a sample analysis system sample system supporting stage. The present invention eliminates the requirement os extensice sample analysis system component realignment when alternatingly performing analysis of sample systems mounted upon, and mounted other than upon, a sample analysis system sample system supporting stage.
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