Date of this Version
United States Patent Thompson et al. Patent Number: 5,706,087
Disclosed is an electromagnetic beam directing means for use with sample analysis systems, such as relfectometers, ellipsometers and polarimeters and the like, use of which facilitates investigation of sample systems which are not mounted to a sample analysis system sample system supporting stage. The present invention eliminates the requirement os extensice sample analysis system component realignment when alternatingly performing analysis of sample systems mounted upon, and mounted other than upon, a sample analysis system sample system supporting stage.