Optimal electrode shape and size for shear mode thin film acoustic wave resonators

Authors

L. M. Xu, University of Electronic Science and Technology, Chengdu, China
B. B. Tang, Huazhong University of Science and Technology, Wuhan, China
Y. T. Hu, Huazhong University of Science and Technology, Wuhan, China
H. Fan, Nanyang Technological University, Singapore
J. S. Yang, University of Nebraska-LincolnFollow

Date of this Version

2009

Comments

Published in APPLIED PHYSICS LETTERS 95, 233501 (2009); doi:10.1063/1.3271981 Copyright © 2009 American Institute of Physics. Used by permission.

Abstract

We study electrode shape and size for plates of hexagonal crystals or polarized ceramics with the sixfold axis or the poling direction parallel to the plate surfaces so that they can be excited into thickness-shear vibration by an electric field in the plate thickness direction. Electrode size and shape optimal in the sense that they satisfy the criterion of Bechmann’s number in every direction are determined.